ELEN 671 Fabric. of Nano Devices

The state of the art in the microsystems device fabrication will be covered, from standard CMOS processes to niche advanced prototyping techniques of usage in new areas as photonics, MEMS, OMEMS, thin-film FETs and biosensors. Non-standard techniques such as mixed-lithography, focused ion beam milling, nanostructure self-assembly and interference lithography will also be covered.