ECCE 772 Advanced Microsystem Design
This course covers the design, modeling and characterization of micro-electro-mechanical systems (MEMS) with emphasis on the full microsystem design flow using state-of-the-art computer-aided design (CAD) tools. It addresses the various MEMS sensing and actuation modalities and provides in-depth treatment of the multi-faceted interplay between process, device, and electronic interface with its impact on overall system performance. Throughout the course, repeated use will be made of fundamental multi-domain formulations, CAD tools, and parameterized macromodels. Specific MEMS case studies will be selected from the areas of inertial motion sensing, piezoelectric energy harvesting, ultrasound transduction, RF-MEMS, and optical MEMS.