Graduate Catalog

MEEN 766 MEMS Theory and Applications

This course is designed to teach students Micro-Electro-Mechanical Systems (MEMS) design, analysis and applications. The course focuses on advanced MEMS theory, design considerations, squeeze film damping, types of sensors and actuators, micro-resonators, gyroscopes and their applications, and economics of microfabrication.

Credits

3

Distribution

3-0-3

Offered

Spring